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Credits: 3

Catalog Description: EE 535 Introduction to MEMS     (3+0+0) 3
Introduction to Micro Electro Mechanical Systems (MEMS) and to the fundamentals of micromachining and microfabrication techniques, thin-film processes, photolithography, deposition and etching techniques for MEMS fabrication. Multi-domain analysis of sensing and transduction mechanisms, capacitive and piezoresistive techniques, and design and analysis of micromachined sensors and actuators. Review of pressure sensors, accelerometers, gyroscopes and resonators and their applications.

Coordinator: Şenol Mutlu, Assistant Professor of Electrical Engineering

Goals: This course aims to expose students to the fundamentals of microfabrication technologies; teach working principles and fabrication methods of sensors and actuators and their integration to integrated circuits; give an understanding of non-electrical signals like mechanic and thermal.

Learning Objectives:

At the end of this course, students will be able to:

  Explain and understand various semiconductor and MEMS microfabrication technologies.
  Explain and design fabrication process flows of semiconductor and MEMS sensor and actuators.
  Explain working principles of MEMS capacitive and piezoresistive sensors and capacitive actuators.
  Analyze simple mechanical systems composed of mass, spring and dash-pot using equivalent lump elements in electrical domain.

Textbook: No required textbook. Class notes, handouts and other supplementary materials are provided to the students

Reference Texts:

1. Gregory T.A. Kovacs, Micromachined Transducers Sourcebook, McGraw Hill, 1998.
2. Stephen D. Senturia, Microsystem Design, Kluwer Academic Publishers, 2004.
3. M. Madou, Fundamentals of Microfabrication, CRC Press, Inc. Boca Raton, FL., 2002.

Prerequisites by Topic:

1. Undergraduate level math, calculus, and differential equations
2. Basic undergraduate-level physics and chemistry
3. Basic circuits knowledge


1. Introduction (3 hours)
2. Review of standard semiconductor planar processing technologies  (6 hours)
3. Review of bulk and surface micromachining technologies (6 hours)
4. Review of mechanical systems and their lumped modeling in circuits. (9 hours)
5. Capacitive sensors and actuators (9 hours)
6. Piezoresistive sensors (4 hours)


Course Structure: The class meets twice a week. One lecture is two hours long and the other is one hour long. 2 sets of homework problems equivalent to 6 biweekly given homework are assigned per semester. There is one in-class midterm exam and a final exam.

Computer Resources: None

Laboratory Resources: None.


Homework (total) (25%).
A midterm exam (25%)
A final exam (50%).

Outcome Coverage:

(a) Apply math, science and engineering knowledge. This course is about design, fabrication and analysis of sensors and actuators. Since these devices interface integrated circuits to the real world, math, science and engineering fundamentals are essential in their understanding and development. Therefore, students are exposed to this knowledge extensively in this class.
(c) Design a system, component or process to meet desired needs. In this class the knowledge of how to design the structure and fabrication process of micromachined sensors and actuators for specific needs related to pressure, acceleration, and temperature are taught.
d) An ability to function on multi-disciplinary teams. Micro electro mechanical systems is a multidisciplinary field. It requires the knowledge of electrical, mechanical, thermal, fluidic, chemical and biological domains. Students are exposed to these multi-disciplinary topics in this class and therefore, gain abilities to function in multi-disciplinary teams.
(e) Identify, formulate and solve engineering problems. The homework and exams involve solving engineering problems and motivate to propose personal solutions.
(i) A recognition of the need for, and an ability to engage in life-long learning. Presentations and discussions of most recent technical literature, continuous advances and comparison with accumulated historical background stimulate students to recognize the need for and an ability to engage in a life-long learning.

Prepared By: Şenol Mutlu


Boğaziçi Üniversitesi - Elektrik ve Elektronik Mühendisliği Bölümü

34342 - Bebek / İSTANBUL

Tel: +90 212 359 64 14
Fax: +90 212 287 24 65







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